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The oxidation diffusion furnace is a key process equipment for the production of PV cells. It mixes and diffuses trace amounts of boron, phosphorus and other elements on the silicon wafer at high temperatures to prepare P-N junctions and composes integrated circuits from it. It can also be used to preparing SiOx films on the surface of the silicon wafer to protect wafers.It is common to use thermocouples measuring both the inner and outer parts of the furnace to control the inner temperature of the diffusion furnace that could perform the oxidation process. Each specified temperature zone has an outer and inner thermocouple to make sure the measure results are reliable. The Multipoint Noble Metal Quartz Thermocouples are used to measure wafer temperature, it commonly has 3~9 measure points, representing the wafer temperature accurately.

 

 

To this end, Duchin have developed proprietary techniques and products such as Multipoint Noble Metal Quartz Thermocouple for temperature measurement of the entire section in the diffusion furnace, a calibration device for multi-point thermocouple.

The product has some traits of reliable temperature measurement, high accuracy, good stability, fast thermal response, anti-interference, high and low-temperature impact resistance, long service life, and so on. The technical parameters of the Multipoint Noble Metal Quartz Thermocouple are as follows:

Technical Parameters	Internal Thermocouple
Type	S,R
Wire or MIMS Diameter	φ0.35~0.5
Working Temp(℃)	0~1100
Accuracy(℃)	±1.0
Protective Tube Length(mm)	≤4000
Protective Tube Diameter(mm)	φ12~18
Protective Tube Material	Quartz
Hot End Structure	Exposed
Number of Points	3~6 Points
Termination	Small Connector
Compensation Wire	SC-2×0.5FPF
Structure Characteristics	To assemble T/C in combination for each point is quite difficult

 

 

 

 

 

 

 

 

 

 

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